CHARACTERISTICS OF EPITAXIAL Y-BA-CU-O THIN-FILMS GROWN BY AEROSOL MOCVD TECHNIQUE

YBa2Cu3O7-x/MgO(100) epitaxial films (Tcoff approximately=80 K and Jc approximately=107 A cm-2 at T=4.2 K, B=5 T) were prepared using an unconventional MOCVD technique. The method is based on the use of a solution of Y-, Ba- and Cu- beta -diketonates, carried to the reaction zone in aerosol form. In the paper the essentials of aerosol MOCVD technique and the results of film characterization by X-ray diffraction analysis, scanning electron microscopy, Raman spectroscopy and critical current measurements are represented.