PUMPING OF HYDROGEN DURING PLASMA GRAPHITE INTERACTION

被引:37
作者
HSU, WL
CAUSEY, RA
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574738
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2768 / 2772
页数:5
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