A CRYSTAL SPECTROGRAPH FOR A SOFT-X-RAY MEASUREMENT IN IMPLODING PLASMA-EXPERIMENTS

被引：2

作者：

SHIMODA, K

YAMAMOTO, T

TAKADA, S

SONE, H

HIRANO, K

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 03期

关键词：

D O I：

10.1143/JJAP.26.451

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：451 / 454

页数：4

共 13 条

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HOBBY, MG .

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[12] X-RAY-LITHOGRAPHY USING A PULSED PLASMA SOURCE [J].

PEARLMAN, JS ;

RIORDAN, JC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1190-1193

YAMAMOTO, T ;

SHIMODA, K ;

HIRANO, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (03) :324-327