NEW DUAL-BATH TECHNIQUE FOR ELECTRODEPOSITION OF SHORT REPEAT LENGTH MULTILAYERS

被引：25

作者：

GOLDMAN, LM

ROSS, CA

OHASHI, W

WU, D

SPAEPEN, F

机构：

来源：

关键词：

D O I：

10.1063/1.102351

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2182 / 2184

页数：3

共 22 条

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