DIELECTRIC PROPERTIES OF SrTiO3 THIN FILMS AT LOW TEMPERATURE

被引：2

作者：

Kain, A. Z. ^{[1
]}

Pettiette-Hall, C. L. ^{[1
]}

Daly, K. P. ^{[1
]}

Lee, A. E. ^{[1
]}

Hu, R. ^{[1
]}

Burch, J. F. ^{[1
]}

机构：

[1] TRW Space & Technol Grp, One Space Pk, Redondo Beach, CA 90278 USA

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 1993年 / 3卷 / 01期

关键词：

Capacitors - Ceramic materials - Copper oxides - Crystals - Dielectric properties of solids - Epitaxial growth - High temperature superconductors - Strontium compounds - Thin films - Yttrium compounds;

D O I：

10.1109/77.233631

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Epitaxially grown SrTiO3 thin films on c-axis oriented YBCO have good insulating properties for use in high temperature superconducting YBCO multilayer devices. We have fabricated YBCO (or Ag)/SrTiO3/YBCO capacitors for low frequency measurements and SrTiO3/YBCO/LaAlO3 coplanar waveguide end coupled resonators for high frequency measurements of the SrTiO3 dielectric constant at low temperatures. From the capacitor measurements, we obtained values for the dielectric constant which range from approximately 200 to 800 for films of various thicknesses. This behavior of the thin film dielectric constant differs from that of the bulk crystal.

引用

页码：1421 / 1424

页数：4

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