IONIC AND NEUTRAL SPECIES DETECTED BY MASS-SPECTROMETRY IN A RADIO-FREQUENCY DISCHARGE OF TETRAFLUOROETHYLENE

被引：26

作者：

VASILE, MJ ^{[1
]}

SMOLINSKY, G ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1021/j100541a005

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：2605 / 2609

页数：5

共 26 条

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