HIGH RESISTIVITY TRANSPARENT ZNO THIN FILMS

被引:72
作者
RAIMONDI, DL
KAY, E
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 01期
关键词
D O I
10.1116/1.1315841
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:96 / &
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