MOLECULAR REACTIONS AT THE FILM SURFACE IN PLASMA POLYMERIZATION

被引:1
作者
BUSS, RJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575247
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1919 / 1920
页数:2
相关论文
共 3 条
[1]   MOLECULAR REACTIONS AT PLASMA-POLYMERIZED FILM SURFACES [J].
BUSS, RJ .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (08) :2977-2982
[2]  
PARTLOW WD, 1986, MATER RES SOC S P, V68, P309
[3]   MODEL FOR KINETICS OF PLASMA POLYMERIZATION [J].
TIBBITT, JM ;
JENSEN, R ;
BELL, AT ;
SHEN, M .
MACROMOLECULES, 1977, 10 (03) :647-653