DETECTION OF TRACE CONCENTRATIONS OF COLUMN-III AND COLUMN-V HYDRIDES BY LASER-INDUCED BREAKDOWN SPECTROSCOPY

被引：25

作者：

CHENG, EAP ^{[1
]}

FRASER, RD ^{[1
]}

EDEN, JG ^{[1
]}

机构：

[1] UNIV ILLINOIS,EVERITT LAB,URBANA,IL 61801

来源：

APPLIED SPECTROSCOPY | 1991年 / 45卷 / 06期

关键词：

FLUORESCENCE; LASERS; ND-YAG; UV-VISIBLE SPECTROSCOPY; LASER-INDUCED BREAKDOWN SPECTROSCOPY;

D O I：

10.1366/0003702914336273

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The measurement of trace concentrations (1-400 ppm) of polyatomic molecular impurities in helium was investigated by laser-induced break-down spectroscopy (LIBS). For the Column III and V hydrides such as B2H6, PH3, and AsH3, the detectability limits with the present apparatus were determined to be 1, 3, and approximately 1 ppm, respectively. It is expected that resorting to synchronous detection techniques will improve the sensitivity of LIBS for this application by as much as an order of magnitude.

引用

页码：949 / 952

页数：4

共 12 条

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