STEPPING MOTOR ADAPTER ACTUATOR FOR A COMMERCIAL UHV LINEAR MOTION FEEDTHROUGH

被引：1

作者：

IAROCCI, M

OVERSLUIZEN, T

机构：

[1] National Synchrotron Light Source, Brookhaven National Laboratory, Upton

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 1990年 / 291卷 / 1-2期

关键词：

D O I：

10.1016/0168-9002(90)90083-I

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An adaptor coupling has been developed that will allow the attachment of a standard stepping motor to a precision commercial ultra-high-vacuum (UHV) linear motion feedthrough commercially available from Varian. The assembly, consisting of the motor, motor adaptor, limit switches, etc., is clamped to the feedthrough body, which can be done under vacuum conditions if necessary. With a 500-step/rev. stepping motor the resolution is 1.27 μm per step. We presently use this assembly in a remote location for the precise positioning of a beam sensing monitor. © 1990.

引用

页码：340 / 342

页数：3