CATHODOLUMINESCENCE STUDIES OF ORIENTED DIAMOND FILMS

被引:2
作者
BUHAENKO, DS [1 ]
SOUTHWORTH, P [1 ]
JENKINS, CE [1 ]
ELLIS, PJ [1 ]
STONER, BR [1 ]
机构
[1] KOBE STEEL USA LTD,CTR ELECTR MAT,RES TRIANGLE PK,NC 27709
关键词
D O I
10.1016/0925-9635(94)90301-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Transport properties of highly oriented diamond films have shown a marked improvement over random polycrystalline material. Scanning cathodoluminescence microscopy has been used to determine the type of defects present in oriented films and the way in which they are distributed in the layers. Our results show that undoped films contain significant nitrogen and silicon impurities, which are homogeneously distributed across individual diamond grains. In contrast, boron-doped layers are characterized by intense blue Band A and intrinsic edge emission: these signals arise from localized regions which correspond to grain boundaries. Between these regions, cathodoluminescence emissions are reduced and are similar to the undoped film; however, free-exciton emissions are increased. These observations are discussed in terms of film structure and impurity incorporation, and it is suggested that compensation of boron by nitrogen impurities may explain the absence of green Band A and bound-exciton-related emission for these films.
引用
收藏
页码:926 / 931
页数:6
相关论文
共 15 条
[1]  
BUHANKO DS, 1993, UNPUB
[2]   ELECTRON-MICROSCOPY OF THE GROWTH FEATURES AND CRYSTAL-STRUCTURES OF FILAMENT ASSISTED CVD DIAMOND FILMS [J].
CLAUSING, RE ;
HEATHERLY, L ;
MORE, KL ;
BEGUN, GM .
SURFACE & COATINGS TECHNOLOGY, 1989, 39 (1-3) :199-210
[3]   THE CHARACTERIZATION OF POINT-DEFECTS IN DIAMOND BY LUMINESCENCE SPECTROSCOPY [J].
COLLINS, AT .
DIAMOND AND RELATED MATERIALS, 1992, 1 (5-6) :457-469
[4]   INTRINSIC AND EXTRINSIC CATHODOLUMINESCENCE FROM SINGLE-CRYSTAL DIAMONDS GROWN BY CHEMICAL VAPOR-DEPOSITION [J].
COLLINS, AT ;
KAMO, M ;
SATO, Y .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1989, 1 (25) :4029-4033
[5]   DEVICE APPLICATION OF DIAMONDS [J].
GEIS, MW .
CARBON, 1990, 28 (06) :806-806
[6]   CATHODOLUMINESCENCE AND ELECTROLUMINESCENCE OF UNDOPED AND BORON-DOPED DIAMOND FORMED BY PLASMA CHEMICAL VAPOR-DEPOSITION [J].
KAWARADA, H ;
YOKOTA, Y ;
MORI, Y ;
NISHIMURA, K ;
HIRAKI, A .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (02) :983-989
[7]   EXCITONIC RECOMBINATION RADIATION AS CHARACTERIZATION OF DIAMONDS USING CATHODOLUMINESCENCE [J].
KAWARADA, H ;
YAMAGUCHI, A .
DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) :100-105
[8]   SYNTHESIS OF DIAMONDS BY USE OF MICROWAVE PLASMA CHEMICAL-VAPOR DEPOSITION - MORPHOLOGY AND GROWTH OF DIAMOND FILMS [J].
KOBASHI, K ;
NISHIMURA, K ;
KAWATE, Y ;
HORIUCHI, T .
PHYSICAL REVIEW B, 1988, 38 (06) :4067-4084
[9]  
KOBASHI K, 1993, COMMUNICATION
[10]   CATHODOLUMINESCENCE SCANNING MICROSCOPY [J].
PETROV, VI .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1992, 133 (02) :189-230