QUANTITATIVE-ANALYSIS OF THIN-FILMS BY DC ARC OPTICAL EMISSION-SPECTROSCOPY

被引：7

作者：

HOGREFE, AW

LOWRY, RK

机构：

来源：

APPLIED SPECTROSCOPY | 1978年 / 32卷 / 03期

关键词：

Compendex;

D O I：

10.1366/000370278774331332

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

SEMICONDUCTOR DEVICE MANUFACTURE

引用

页码：281 / 287

页数：7

共 24 条

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WITMER, AW ;

PONSIOEN, JC ;

DAMEN, CPTM .

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KERN W, 1972, MAY EL SOC M HOUST

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