HIGH-RESOLUTION CAPACITIVE PRESSURE GAUGES

被引：44

作者：

ADAMS, ED ^{[1
]}

机构：

[1] UNIV FLORIDA,CTR ULTRALOW TEMP PHYS,GAINESVILLE,FL 32611

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 03期

关键词：

D O I：

10.1063/1.1144184

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Design, construction, methods of measurement, and uses of high-resolution capacitive pressure gauges in low temperature applications are reviewed. Pressure gauges for use from 10(-3) to over 10(7) Pa, with a resolution of as high as 1 X 10(-8) are described. Many uses that have been made of these gauges are mentioned with emphasis on He-3 melting pressure thermometry.

引用

页码：601 / 611

页数：11

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