ATOMIC IMPLANTATION OF NB IN AMORPHOUS NB2O5 BY RF SPUTTERING

被引：4

作者：

FUSCHILLO, N ^{[1
]}

LALEVIC, B ^{[1
]}

ANNAMALAI, NK ^{[1
]}

机构：

[1] RUTGERS STATE UNIV,ELECT ENGN DEPT,NEW BRUNSWICK,NJ 08903

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568582

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：52 / 55

页数：4

共 11 条

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FUSCHILLO N, TO BE PUBLISHED

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[3]

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[4] POOLE-FRENKEL CONDUCTION IN AMORPHOUS SOLIDS [J].

HILL, RM .

PHILOSOPHICAL MAGAZINE, 1971, 23 (181) :59-&

[5]

Jonscher A. K., 1972, J NONCRYST SOLIDS, V810, P293, DOI DOI 10.1016/0022-3093(72)90151-2

[6]

LALEVIC B, 1974, B AM PHYS SOC, V19, P50

[7]

LALEVIC B, 1974, PHYS STATUS SOLIDI, V23, P1085

[8]

Maissel L.I., 1970, HDB THIN FILM TECHNO

[9]

Mayer J. W., 1970, ION IMPLANTATION SEM

[10]

Simmons J. G., 1970, HDB THIN FILM TECHNO