WF6-CVD TUNGSTEN FILM AS AN EMITTER FOR A THERMIONIC ENERGY CONVERTER .1. PRODUCTION, TEXTURE AND MORPHOLOGY OF WF6-CVD TUNGSTEN FILMS

被引：9

作者：

GUBBELS, GHM

WOLFF, LR

METSELAAR, R

机构：

来源：

关键词：

D O I：

10.1016/0169-4332(89)90002-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：193 / 199

页数：7

共 14 条

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[2]

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[3]

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[4]

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[5]

FESTA JV, 1967, P INT C CHEM VAPOR D

[6]

Gubbels G. H. M., 1986, 21st Intersociety Energy Conversion Engineering Conference: Advancing Toward Technology Breakout in Energy Conversion, P1343

GUBBELS, GHM ;

WOLFF, LR ;

METSELAAR, R .

[8]

GUBBELS GHM, 1989, ISBN9068190091 EINDH

[9]

Hatsopoulos G.N., 1979, THERMIONIC ENERGY CO, V2

[10]

HATSOPOULOS GN, 1979, THERMIONIC ENERGY CO, V1