GLANCING ANGLE X-RAY STUDY OF THE EFFECT OF OXYGEN ON INTERFACE REACTIONS IN AL/NI BILAYERS

被引:14
作者
HEALD, SM
BARRERA, EV
机构
[1] Applied Physics Division, Brookhaven National Laboratory, Upton, New York
[2] Department of Mechanical Engineering and Materials Science, Rice University, Houston, Texas
关键词
D O I
10.1557/JMR.1991.0935
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Glancing angle x-ray reflectivity and EXAFS measurements have been made on a series of UHV prepared Al/Ni bilayers with varying amounts of oxygen impurities. These samples show an intrinsic reacted region prior to annealing, and for clean samples further reaction occurs at 250-degrees-C. Oxygen is found to influence strongly the course of the reaction with an effect which depends on its location. A few percent O impurity within the Al film strongly suppresses the grain boundary diffusion path, which allows the growth of a smooth NiAl3 layer. Interfacial O exposures of 60 and 600 Langmuir both inhibit the initial reaction and raise the temperature at which further reaction occurs to as much as 300-degrees-C with an effect which depends on exposure. The thickness of the intrinsic reaction zone is about 60 angstrom for clean samples, and is nearly eliminated for contaminated interfaces. The results indicate that surface/interface, grain boundary, and bulk diffusion all play important roles in the formation of these interfaces, and that each of these is influenced by O impurities.
引用
收藏
页码:935 / 942
页数:8
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