HIGH-PERFORMANCE, LOW-NOISE DIGITAL CONTROLLER FOR INCHWORM PIEZOELECTRIC TRANSLATORS

被引：14

作者：

CHEN, X ^{[1
]}

COUSINS, B ^{[1
]}

MCELLISTREM, M ^{[1
]}

HAMERS, RJ ^{[1
]}

机构：

[1] UNIV WISCONSIN,DEPT CHEM,1101 UNIV AVE,MADISON,WI 53706

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 10期

关键词：

D O I：

10.1063/1.1143729

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have designed and constructed a high-performance, low-noise digital controller for "inchworm" piezoelectric translators. The controller features a maximum output voltage of 700 V, an rms noise level of less than 2 mV, and is capable of driving inchworms at speeds of up to 0.23 mm/s. The controller offers substantially better performance in terms of resolution, noise, speed, and cost than commercial controllers, and is suitable for atomic resolution scanning tunneling microscopy and atomic force microscopy applications.

引用

页码：4308 / 4313

页数：6