EFFECT OF BUOYANCY FORCES AND REACTOR ORIENTATION ON FLUID-FLOW AND GROWTH-RATE UNIFORMITY IN COLD-WALL CHANNEL CVD REACTORS

被引：39

作者：

HOLSTEIN, WL

FITZJOHN, JL

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1989年 / 94卷 / 01期

关键词：

D O I：

10.1016/0022-0248(89)90613-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：145 / 158

页数：14

共 26 条

[1] BUOYANCY EFFECTS IN THE ENTRANCE REGION OF HORIZONTAL RECTANGULAR CHANNELS [J].

ABOUELLAIL, MMM ;

MORCOS, SM .

JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 1983, 105 (04) :924-928

[2] EXPERIMENTS ON ONSET OF LONGITUDINAL VORTICES IN LAMINAR FORCED CONVECTION BETWEEN HORIZONTAL PLATES [J].

AKIYAMA, M ;

HWANG, GJ ;

CHENG, KC .

JOURNAL OF HEAT TRANSFER, 1971, 93 (04) :335-&

[3]

Berkman S., 1978, Heteroepitaxial semiconductors for electronic devices, P264

[4]

BLOEM J, 1977, CURRENT TOPICS MATER, V1, P214

[5]

CHIU KC, 1984, 10TH P INT C CHEM VA, P175

[6]

CILING LJ, 1985, CRYSTAL GROWTH ELECT, P71

[7] A MATHEMATICAL-MODEL OF THE COUPLED FLUID-MECHANICS AND CHEMICAL-KINETICS IN A CHEMICAL VAPOR-DEPOSITION REACTOR [J].

COLTRIN, ME ;

KEE, RJ ;

MILLER, JA .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (02) :425-434

[8]

COLTRIN ME, 1986, J ELECTROCHEM SOC, V133, P1207

[9]

COLTRIN ME, 1984, 9TH P INT C CHEM VAP, P31

[10] GRAVITATIONAL INSTABILITY BETWEEN HORIZONTAL PLATES WITH SHEAR [J].

DEARDORFF, JW .

PHYSICS OF FLUIDS, 1965, 8 (06) :1027-+

← 1 2 3 →