OBLIQUE-FIELD ANNEALING EFFECT FOR INPLANE MAGNETIC-ANISOTROPY OF SOFT-MAGNETIC CO-NB-ZR THIN-FILMS

被引：9

作者：

TOMITA, H

SATO, T

MIZOGUCHI, T

机构：

[1] Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki, 210, 1-KomukaiToshiba-Cho, Saiwai-Ku

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1994年 / 30卷 / 03期

关键词：

D O I：

10.1109/20.297774

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The effect of annealing in a magnetic field applied obliquely to the surface of soft magnetic thin films has been investigated. This annealing method was found to be extremely effective to control in-plane magnetic anisotropy without a change of annealing temperature and to suppress local anisotropy dispersion. For sputtered amorphous Co85.5Nb8.9Zr5.6 thin films, it has been found that the in-plane uniaxial anisotropy energy was varied from 250 J/m3 to near zero with the coercive force H(c) less than 6.5 A/m by changing the oblique-field annealing angle alpha. Experimental values of in-plane anisotropy energy agreed well with calculated ones predicted from alpha and intrinsic anistropy induced by quasi-directional ordering. These films showed good high frequency characteristics for applying to maniaturized inductive devices.

引用

页码：1336 / 1339

页数：4

共 12 条

[1]

Chikazumi S., 1964, PHYS MAGNETISM

[2] DEPENDENCE OF GEOMETRIC MAGNETIC ANISOTROPY IN THIN IRON FILMS [J].

KNORR, TG ;

HOFFMAN, RW .

PHYSICAL REVIEW, 1959, 113 (04) :1039-1046

[3] THE ROLE OF 2-LEVEL SYSTEMS IN AMORPHOUS METALLIC ALLOYS .1. INDUCED ANISOTROPY IN AMORPHOUS FERROMAGNETS [J].

KRONMULLER, H .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02) :661-673

[4] ANNEALING BEHAVIOR OF MAGNETIC-ANISOTROPY IN CONBZR FILMS [J].

MIURA, M ;

KATAHASHI, H ;

MURAMORI, K ;

KAJIYAMA, M .

IEEE TRANSACTIONS ON MAGNETICS, 1988, 24 (05) :2215-2220

[5]

SASADA I, 1991, TECH REP IEE JAPAN, V58

[6] STUDY OF HIGH-POWER PLANAR INDUCTOR [J].

SATO, T ;

HASEGAWA, M ;

MIZOGUCHI, T ;

SAHASHI, M .

IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :5277-5279

[7]

SLONCZEWSKI JC, 1963, MAGNETISM, V1, pCH5

[8]

Smith D.O., 1959, J APPL PHYS, V30, pS264, DOI [10.1063/1.2185921, DOI 10.1063/1.2185921]

[9] OBLIQUE-INCIDENCE ANISOTROPY IN EVAPORATED PERMALLOY FILMS [J].

SMITH, DO ;

COHEN, MS ;

WEISS, GP .

JOURNAL OF APPLIED PHYSICS, 1960, 31 (10) :1755-1762

[10] MAGNETIC THIN-FILM INDUCTORS FOR INTEGRATED-CIRCUIT APPLICATIONS [J].

SOOHOO, RF .

IEEE TRANSACTIONS ON MAGNETICS, 1979, 15 (06) :1803-1805

← 1 2 →