LIGHT-ION SPUTTERING YIELDS FOR MOLYBDENUM AND GOLD AT LOW ENERGIES

被引:83
作者
BAY, HL [1 ]
ROTH, J [1 ]
BOHDANSKY, J [1 ]
机构
[1] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER
关键词
D O I
10.1063/1.323538
中图分类号
O59 [应用物理学];
学科分类号
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页码:4722 / 4728
页数:7
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