SPATIAL PERIOD DIVISION - A NEW TECHNIQUE FOR EXPOSING SUB-MICROMETER-LINEWIDTH PERIODIC AND QUASI-PERIODIC PATTERNS

被引：49

作者：

FLANDERS, DC

HAWRYLUK, AM

SMITH, HI

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570362

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1949 / 1952

页数：4

共 16 条

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[2]

DEGRAFF PD, 1979, J VAC SCI TECHNOL, V16, pR40

[3] SURFACE RELIEF STRUCTURES WITH LINEWIDTHS BELOW 2000A [J].

FLANDERS, DC ;

SMITH, HI ;

LEHMANN, HW ;

WIDMER, R ;

SHAVER, DC .

APPLIED PHYSICS LETTERS, 1978, 32 (02) :112-114

[4]

FLANDERS DC, UNPUBLISHED

[5]

FLANDERS DC, 1979, J VAC SCI TECHNOL, V16, pR40

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GEIS, MW ;

FLANDERS, DC ;

SMITH, HI .

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KNOP, K .

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VOLLMER, HJ .

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[9] POSSIBLE APPLICATIONS OF SURFACE-CORRUGATED QUANTUM THIN-FILMS TO NEGATIVE-RESISTANCE DEVICES [J].

SAKAKI, H ;

WAGATSUMA, K ;

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SAITO, S .

THIN SOLID FILMS, 1976, 36 (02) :497-501

[10] OPTICAL TECHNIQUE FOR PRODUCING 0.1-MU PERIODIC SURFACE-STRUCTURES [J].

SHANK, CV ;

SCHMIDT, RV .

APPLIED PHYSICS LETTERS, 1973, 23 (03) :154-155

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