APPLICATION OF METHODS OF FUZZY MATHEMATICS TO THE DETERMINATION OF THE MICROMORPHOLOGY OF TIO2 CVD THIN-FILMS

被引：2

作者：

VAIJA, P ^{[1
]}

LAHOUIDAK, J ^{[1
]}

DURAND, J ^{[1
]}

COT, L ^{[1
]}

机构：

[1] ECOLE NATL SUPER CHIM MONTPELLIER,PHYSICOCHIM MAT LAB,CNRS,URA 131,F-34053 MONTPELLIER,FRANCE

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1993年 / 11卷 / 06期

关键词：

D O I：

10.1016/0955-2219(93)90115-8

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The influence of the process parameters (temperature, total pressure, partial pressure of the TiO2 precursor) has been studied. A columnar morphology is obtained above 500-degrees-C at low pressure, while equiaxial crystals are observed at high total pressure. The experimental morphology diagram derived from the experimental observations was completed applying a simple fuzzy expert system and a fuzzy extrapolation method.

引用

页码：551 / 557

页数：7