SILICON RESONATOR SENSORS - INTERROGATION TECHNIQUES AND CHARACTERISTICS

被引：39

作者：

TUDOR, MJ

ANDRES, MV

FOULDS, KWH

NADEN, JM

机构：

[1] UNIV VALENCIA,DEPT FIS APLICADA,E-46100 VALENCIA,SPAIN

[2] UNIV SURREY,DEPT PHYS,GUILDFORD GU2 5XF,SURREY,ENGLAND

[3] STC TECHNOL LTD,HARLOW CM17 9NA,ESSEX,ENGLAND

来源：

IEE PROCEEDINGS-D CONTROL THEORY AND APPLICATIONS | 1988年 / 135卷 / 05期

关键词：

D O I：

10.1049/ip-d.1988.0055

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：364 / 368

页数：5

共 17 条

[1] NONLINEAR VIBRATIONS AND HYSTERESIS OF MICROMACHINED SILICON RESONATORS DESIGNED AS FREQUENCY-OUT SENSORS [J].

ANDRES, MV ;

FOULDS, KWH ;

TUDOR, MJ .

ELECTRONICS LETTERS, 1987, 23 (18) :952-954

[2] ANALYSIS OF AN INTERFEROMETRIC OPTICAL FIBER DETECTION TECHNIQUE APPLIED TO SILICON VIBRATING SENSORS [J].

ANDRES, MV ;

TUDOR, MJ ;

FOULDS, KWH .

ELECTRONICS LETTERS, 1987, 23 (15) :774-775

[3] OPTICAL ACTIVATION OF A SILICON VIBRATING SENSOR [J].

ANDRES, MV ;

FOULDS, KWH ;

TUDOR, MJ .

ELECTRONICS LETTERS, 1986, 22 (21) :1097-1099

[4]

ANDRES MV, 1987, 3RD EUR C SENS APPL

[5] MODIFICATIONS OF THE DOUBLE-ENDED TUNING FORK GEOMETRY FOR REDUCED COUPLING TO ITS SURROUNDINGS - FINITE-ELEMENT ANALYSIS AND EXPERIMENTS [J].

CLAYTON, LD ;

SWANSON, SR ;

EERNISSE, EP .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1987, 34 (02) :243-252

[6]

EPWORTH RE, 1979, MAR FIBR OPT C WASH

[7]

GREENWOOD CJ, 1984, J PHYS E, V17, P650

[8]

KLEMENS PG, 1965, PHYSICAL ACOUSTICS B, V3

[9]

LANDAU, 1959, FLUID MECHANICS

[10] RESONATOR SENSORS - A REVIEW [J].

LANGDON, RM .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1985, 18 (02) :103-115

← 1 2 →