DOSIMETRY FOR LITHOGRAPHIC APPLICATIONS

被引：13

作者：

SHAW, JM

HATZAKIS, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571273

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1343 / 1347

页数：5

共 20 条

[1] POLY(HALO)STYRENE THIN-FILM DOSIMETERS FOR HIGH DOSES [J].

BISHOP, WP ;

HUMPHERY.KC ;

RANDTKE, PT .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1973, 44 (04) :443-452

[2] PHOTOMETRIC PAPERS SENSITIVE ONLY TO SHORT WAVE ULTRAVIOLET [J].

CHALKLEY, L .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1952, 42 (06) :387-392

[3] HYDROPHILIC DYE CYANIDES .1. ETHYL GREEN AND XYLENE BLUE CYANIDES [J].

CHALKLEY, L .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1955, 77 (07) :1848-1850

[4] HYDROPHILIC DYE CYANIDES .2. RHODAMINE B CYANIDE [J].

CHALKLEY, L .

JOURNAL OF ORGANIC CHEMISTRY, 1961, 26 (02) :408-&

[5]

CHALKLEY L, 1973, Patent No. 3710109

[6]

CHALKLEY L, 1958, Patent No. 2855438

[7]

HATZAKIS M, 1974, 6TH P INT C EL ION B, P542

[8] RADIACHROMIC - RADIATION MONITORING-SYSTEM [J].

HUMPHERYS, KC ;

KANTZ, AD .

RADIATION PHYSICS AND CHEMISTRY, 1977, 9 (4-6) :737-747

[9]

HUMPHERYS KC, 1979, IEEE T NUCL SCI, V26

[10] ION-BEAM EXPOSURE OF RESIST MATERIALS [J].

KOMURO, M ;

ATODA, N ;

KAWAKATSU, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (03) :483-490

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