ION-BEAM EXTRACTION WITH ION SPACE-CHARGE COMPENSATION IN BEAM-PLASMA TYPE ION-SOURCE

被引：11

作者：

ISHIKAWA, J

SANO, F

TAKAGI, T

机构：

来源：

关键词：

D O I：

10.1063/1.331573

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6018 / 6028

页数：11

共 21 条

[1] ORSAY ELECTRON-BEAM ION-SOURCE [J].

ARIANER, J ;

GOLDSTEIN, C .

[2] FRANKFURT EBIS WITH TIME-OF-FLIGHT OPERATION [J].

BECKER, R ;

KLEIN, H .

[3]

DEMIRKHANOV RA, 1971, SOV PHYS TECH PHYS-U, V15, P1047

[4]

DEMIRKHANOV RA, 1973, SOV PHYS-TECH PHYS, V18, P684

[5] REVIEW OF JINR ELECTRON-BEAM ION SOURCES [J].

DONETS, ED .

[6]

DONETS ED, 1969, 1 INT C ION SOURC PA, P635

[7] A high efficiency ion source [J].

Finkelstein, AT .

[8]

HANZA V, 1963, NASA TND1711 REP

[9]

ISHIKAWA J, 1978, I PHYS C SER, V38, P84

[10]

Langmuir I., 1924, GEN ELECTR REV, V27, P810