MEASUREMENT OF NEUTRAL GAS-DENSITY WITH IONIZATION GAUGES IN PLASMA PHYSICS RESEARCH

被引：9

作者：

BERMAN, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期

关键词：

D O I：

10.1116/1.570876

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1017 / 1022

页数：6

共 36 条

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