A TWO-DIMENSIONAL COMPUTER-SIMULATION FOR DRY ETCHING USING MONTE-CARLO TECHNIQUES

被引：82

作者：

ULACIA, JI

MCVITTIE, JP

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 04期

关键词：

D O I：

10.1063/1.342962

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1484 / 1491

页数：8

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