NEW METHOD FOR ABSORPTION CORRECTION IN HIGH-ACCURACY, QUANTITATIVE EDX MICROANALYSIS IN THE TEM INCLUDING LOW-ENERGY X-RAY-LINES

被引:18
作者
EIBL, O
机构
[1] Research Laboratory, Siemens AG, W-8000 München 83
关键词
Absorption - Radiation detectors - Specimen preparation - Transmission electron microscopy;
D O I
10.1016/0304-3991(93)90008-L
中图分类号
TH742 [显微镜];
学科分类号
摘要
A new method for the absorption correction in quantitative EDX microanalysis in the TEM is outlined, which does not require the knowledge of specimen thickness and mass absorption coefficients for the correction procedure. Both quantities are frequently not available with the desired accuracy for quantitative EDX analysis, in particular if low-energy X-ray lines are used. The absorption correction factor (ACF), a quantity well known from the usually applied Cliff-Lorimer k-factor method, is determined experimentally by taking advantage of special properties of the X-ray transmission coefficients. Two experimental procedures for quantitative EDX are outlined. Which of the two procedures is to be applied depends on the amount of X-ray absorption present in the sample and the take-off angle of the detector. Before starting experimental work, a criterion given in this paper allows one to determine whether method I or II should be used. In method I EDX spectra are acquired from one area of the sample at two different tilt angles of the specimen with respect to the detector. For method II both EDX and EELS spectra need to be recorded from three areas with different thicknesses but the same orientation. Both methods require standards from which spectra are to be acquired under the same vacuum conditions. The preparation of samples suited for this procedure will be outlined. With these new procedures not only quantitative EDX microanalysis including low-energy X-ray lines can be performed with improved accuracy, but one can also quantitatively determine the detector efficiency and compare detector efficiencies of different detector systems on a quantitative basis.
引用
收藏
页码:179 / 188
页数:10
相关论文
共 10 条
[1]   QUANTITATIVE ELECTRON-PROBE MICROANALYSIS OF ULTRALIGHT ELEMENTS (BORON-OXYGEN) [J].
BASTIN, GF ;
HEIJLIGERS, HJM .
SCANNING, 1990, 12 (04) :225-236
[2]   IMPROVED, PARAMETERLESS, CONSTANT-CURRENT METHOD FOR ABSORPTION CORRECTION IN QUANTITATIVE EDX MICROANALYSIS IN THE TEM [J].
EIBL, O .
ULTRAMICROSCOPY, 1993, 50 (02) :203-205
[3]  
HORITA Z, 1986, J ELECTRON MICROSC, V35, P324
[4]   A NEW FORM OF THE EXTRAPOLATION METHOD FOR ABSORPTION CORRECTION IN QUANTITATIVE X-RAY-MICROANALYSIS WITH THE ANALYTICAL ELECTRON-MICROSCOPE [J].
HORITA, ZJ ;
SANO, T ;
NEMOTO, M .
ULTRAMICROSCOPY, 1991, 35 (01) :27-36
[5]  
HREN JJ, 1979, INTRO ANAL ELECTRON
[6]  
Joy DC, 1986, PRINCIPLES ANAL ELEC
[7]   LIGHT-ELEMENT ANALYSIS WITH ELECTRONS AND X-RAYS IN A HIGH-RESOLUTION STEM [J].
THOMAS, LE .
ULTRAMICROSCOPY, 1985, 18 (1-4) :173-184
[8]   A PARAMETERLESS METHOD TO CORRECT FOR X-RAY ABSORPTION AND FLUORESCENCE IN THIN-FILM MICROANALYSIS [J].
VANCAPPELLEN, E ;
VANDYCK, D ;
VANLANDUYT, J ;
ADAMS, F .
JOURNAL DE PHYSIQUE, 1984, 45 (NC-2) :411-414
[9]  
[No title captured]
[10]  
[No title captured]