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MICROWAVE SPUTTERING SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS
被引:8
作者
:
KATO, I
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
KATO, I
[
1
]
CARD, HC
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
CARD, HC
[
1
]
KAO, KC
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
KAO, KC
[
1
]
MEJIA, SR
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
MEJIA, SR
[
1
]
CHOW, L
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
CHOW, L
[
1
]
机构
:
[1]
UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
来源
:
REVIEW OF SCIENTIFIC INSTRUMENTS
|
1982年
/ 53卷
/ 02期
关键词
:
D O I
:
10.1063/1.1136929
中图分类号
:
TH7 [仪器、仪表];
学科分类号
:
0804 ;
080401 ;
081102 ;
摘要
:
引用
收藏
页码:214 / 216
页数:3
相关论文
共 3 条
[1]
DISPERSIVE OPTICAL-CONSTANTS OF AMORPHOUS SE1-XTEX FILMS
ADACHI, H
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
ADACHI, H
KAO, KC
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
KAO, KC
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(12)
: 6326
-
6331
[2]
HOLLAND L, 1963, VACUUM DEPOSITION TH, pCH5
[3]
RADIAL-DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE-TUBE
KATO, I
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
KATO, I
TSUCHIDA, H
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
TSUCHIDA, H
NAGAI, M
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
NAGAI, M
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(10)
: 5312
-
5315
←
1
→
共 3 条
[1]
DISPERSIVE OPTICAL-CONSTANTS OF AMORPHOUS SE1-XTEX FILMS
ADACHI, H
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
ADACHI, H
KAO, KC
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV MANITOBA,DEPT ELECT ENGN,MAT RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
UNIV MANITOBA,DEPT ELECT ENGN,MAT RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
KAO, KC
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(12)
: 6326
-
6331
[2]
HOLLAND L, 1963, VACUUM DEPOSITION TH, pCH5
[3]
RADIAL-DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE-TUBE
KATO, I
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
KATO, I
TSUCHIDA, H
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
TSUCHIDA, H
NAGAI, M
论文数:
0
引用数:
0
h-index:
0
机构:
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
WASEDA UNIV,SCH SCI & ENGN,DEPT ELECTR & COMMUN ENGN,SHINJUKU KU,TOKYO 160,JAPAN
NAGAI, M
[J].
JOURNAL OF APPLIED PHYSICS,
1980,
51
(10)
: 5312
-
5315
←
1
→