MICROWAVE SPUTTERING SYSTEM FOR THE FABRICATION OF THIN SOLID FILMS

被引:8
作者
KATO, I [1 ]
CARD, HC [1 ]
KAO, KC [1 ]
MEJIA, SR [1 ]
CHOW, L [1 ]
机构
[1] UNIV MANITOBA,DEPT ELECT ENGN,MAT & DEVICES RES LAB,WINNIPEG R3T 2N2,MANITOBA,CANADA
关键词
D O I
10.1063/1.1136929
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:214 / 216
页数:3
相关论文
共 3 条
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    ADACHI, H
    KAO, KC
    [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) : 6326 - 6331
  • [2] HOLLAND L, 1963, VACUUM DEPOSITION TH, pCH5
  • [3] RADIAL-DISTRIBUTION OF EXCITED ATOMS IN A NEW COAXIAL LINE TYPE MICROWAVE CW DISCHARGE-TUBE
    KATO, I
    TSUCHIDA, H
    NAGAI, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (10) : 5312 - 5315