THOMSON SCATTERING EXPERIMENTS ON A 100-MHZ INDUCTIVELY-COUPLED PLASMA CALIBRATED BY RAMAN-SCATTERING

被引：51

作者：

DEREGT, JM ^{[1
]}

ENGELN, RAH ^{[1
]}

DEGROOTE, FPJ ^{[1
]}

VANDERMULLEN, JAM ^{[1
]}

SCHRAM, DC ^{[1
]}

机构：

[1] EINDHOVEN UNIV TECHNOL,DEPT PHYS,5600 MB EINDHOVEN,NETHERLANDS

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 05期

关键词：

D O I：

10.1063/1.1146444

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new calibration method to obtain the electron density from Thomson scattering on an inductively coupled plasma is discussed. Raman scattering of nitrogen is used for recovering the Rayleigh scattering signal. This has the advantage that no corrections are necessary for stray light, like with other calibration methods, using the direct measured Rayleigh scattering signal on a well-known gas. It is shown that electron densities and electron temperatures can be measured with an accuracy of about 15% in density and of about 150 K in temperature. © 1995 American Institute of Physics.

引用

页码：3228 / 3233

页数：6

共 10 条

[1] INSTANTANEOUS AND DELAYED-RESPONSES OF LINE-INTENSITIES TO INTERRUPTION OF THE RF POWER IN AN ARGON INDUCTIVELY COUPLED PLASMA [J].

FEY, FHAG ;

STOFFELS, WW ;

VANDERMULLEN, JAM ;

VANDERSIJDE, B ;

SCHRAM, DC .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1991, 46 (6-7) :885-900

[2] THOMSON SCATTERING FROM AN ICP [J].

HUANG, M ;

HIEFTJE, GM .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1985, 40 (10-12) :1387-1400

[3] ISOCONTOUR MAPS OF ELECTRON-TEMPERATURE, ELECTRON NUMBER DENSITY AND GAS KINETIC TEMPERATURE IN THE AR INDUCTIVELY COUPLED PLASMA OBTAINED BY LASER-LIGHT THOMSON AND RAYLEIGH-SCATTERING [J].

HUANG, M ;

HANSELMAN, DS ;

YANG, PY ;

HIEFTJE, GM .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1992, 47 (06) :765-785

[4]

Long DA., 1977, RAMAN SPECTROSCOPY

[5] THOMSON SCATTERING FOR DETERMINING ELECTRON CONCENTRATIONS AND TEMPERATURES IN AN INDUCTIVELY COUPLED PLASMA .2. DESCRIPTION AND EVALUATION OF A MULTICHANNEL INSTRUMENT [J].

MARSHALL, KA ;

HIEFTJE, GM .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1988, 43 (6-7) :851-865

[6]

MEULENBROEKS RFG, 1992, PHYS REV LETT, V69, P2796

[7] ROTATIONAL RAMAN-SCATTERING OF HYDROGEN AND DEUTERIUM FOR CALIBRATING THOMSON SCATTERING DEVICES [J].

ROHR, H .

PHYSICS LETTERS A, 1981, 81 (08) :451-453

[8] 1ST HIGH-REPETITION-RATE THOMSON SCATTERING FOR FUSION PLASMAS [J].

ROHR, H ;

STEUER, KH ;

SCHRAMM, G ;

HIRSCH, K ;

SALZMANN, H .

NUCLEAR FUSION, 1982, 22 (08) :1099-1102

[9] MEASUREMENT OF EFFECTIVE LIGHT-SCATTERING CROSS-SECTIONS USING LOW-POWER HE-NE LASER [J].

TRAPY, J ;

LELIEVRE, JC ;

PICARD, J .

PHYSICS LETTERS A, 1974, A 47 (01) :85-86

[10] A COMBINED THOMSON-RAYLEIGH SCATTERING DIAGNOSTIC USING AN INTENSIFIED PHOTODIODE ARRAY [J].

VANDESANDEN, MCM ;

JANSSEN, GM ;

DEREGT, JM ;

SCHRAM, DC ;

VANDERMULLEN, JAM ;

VANDERSIJDE, B .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (06) :3369-3377

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