OXIDATION OF CLEAN RUTHENIUM SURFACES .2. ATOM PROBE ANALYSES OF OXIDE-FILMS

被引:27
作者
CRANSTOUN, GKL [1 ]
PYKE, DR [1 ]
SMITH, GDW [1 ]
机构
[1] UNIV OXFORD,DEPT MET,OXFORD OX1 3QR,ENGLAND
关键词
D O I
10.1016/0378-5963(79)90070-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The atom probe has been employed to investigate the composition of protective tarnish films which form on ruthenium in oxidising conditions at temperatures between 600 and 950 K. Field evaporation of the oxide produces the ionic fragments Ru, RuO, RuO2, RuO3 and O, from which an analysis may be derived. The oxide film is shown to consist essentially of RuO2, but with a narrow oxygen deficient region at the interface with the substrate which consists of just a few atomic layers and can accommodate the structural misfit between metal and oxide. This technique is shown to offer a unique degree of spatial resolution which should prove invaluable in studies of the oxidation and corrosion of metals and alloys. © 1979.
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页码:375 / 381
页数:7
相关论文
共 4 条
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CRANSTOUN, GKL ;
PYKE, DR .
APPLIED SURFACE SCIENCE, 1979, 2 (03) :359-374
[2]  
MILLER MK, 1977, THESIS OXFORD
[3]  
MUELLER EW, 1968, REV SCI INSTRUM, V39, P83
[4]   TOF ATOM-PROBE INVESTIGATION OF METAL-OXIDES [J].
NG, YS ;
MCLANE, SB ;
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JOURNAL OF APPLIED PHYSICS, 1978, 49 (04) :2517-2522