AUTOMATIC-CONTROL OF CZOCHRALSKI CRYSTAL-GROWTH

被引:52
作者
BARDSLEY, W [1 ]
GREEN, GW [1 ]
HOLLIDAY, CH [1 ]
HURLE, DTJ [1 ]
机构
[1] MINIST DEF, ROY RADAR ESTAB, GREAT MALVERN WR14 3PS, WORCESTERSHIRE, ENGLAND
关键词
D O I
10.1016/0022-0248(72)90215-1
中图分类号
O7 [晶体学];
学科分类号
0702 [物理学]; 070205 [凝聚态物理]; 0703 [化学]; 080501 [材料物理与化学];
摘要
引用
收藏
页码:277 / 279
页数:3
相关论文
共 3 条
[1]
ELECTRONIC DEVICE INCLUDING A TV-SYSTEM FOR CONTROLLING CRYSTAL DIAMETER DURING CZOCHRALSKI GROWTH [J].
GARTNER, KJ ;
UELHOFF, W ;
SEEGER, A ;
RITTINGH.KF .
JOURNAL OF CRYSTAL GROWTH, 1971, 13 (MAY) :619-&
[2]
AUTOMATIC CRYSTAL PULLING WITH OPTICAL DIAMETER CONTROL USING A LASER-BEAM [J].
GROSS, U ;
KERSTEN, R .
JOURNAL OF CRYSTAL GROWTH, 1972, 15 (02) :85-+
[3]
INFRARED TV SYSTEM OF COMPUTER CONTROLLED CZOCHRALSKI CRYSTAL-GROWTH [J].
OKANE, DF ;
BEDNOWIT.AL ;
GULITZ, L ;
KWAP, TW .
JOURNAL OF CRYSTAL GROWTH, 1971, 13 (MAY) :624-&