REAL-TIME MONITORING OF MOLECULAR-BEAM EPITAXY PROCESSES WITH COAXIAL IMPACT-COLLISION ION-SCATTERING SPECTROSCOPY (CAICISS)

被引：9

作者：

KATAYAMA, M ^{[1
]}

NOMURA, E ^{[1
]}

SOEJIMA, H ^{[1
]}

HAYASHI, S ^{[1
]}

AONO, M ^{[1
]}

机构：

[1] SHIMADZU CO LTD,NAKAGYO,KYOTO 604,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 45卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(90)90862-O

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Coaxial impact-collision ion scattering spectroscopy (CAICISS) is a novel form of low-energy ion scattering spectroscopy (ISS), in which a pulsed-beam low-energy ion source and a time-of-flight ion energy analyzer are placed coaxially so as to cover the experimental scattering angle at 180°. It is demonstrated that CAICISS is useful for monitoring molecular-beam epitaxy (MBE) processes in real time by taking the MBE growth of AlAs on a GaAs(001) substrate as an example. © 1990.

引用

页码：408 / 411

页数：4

共 3 条

[1] RECENT DEVELOPMENTS IN LOW-ENERGY ION-SCATTERING SPECTROSCOPY (ISS) FOR SURFACE STRUCTURAL-ANALYSIS [J].