IMPURITY EFFECTS IN A-SI-H SOLAR-CELLS DUE TO AIR, OXYGEN, NITROGEN, PHOSPHINE, OR MONOCHLOROSILANE IN THE PLASMA

被引：31

作者：

DELAHOY, AE

GRIFFITH, RW

机构：

来源：

关键词：

D O I：

10.1063/1.328576

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6337 / 6346

页数：10

共 25 条

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[10]

GRIFFITH RW, 1980, SOLAR MATERIAL SCI, P665