RELATIONS BETWEEN THE PARAMETERS OF THIN-FILM AL-AL2O3-METAL CAPACITORS

被引：2

作者：

BERLICKI, T

机构：

来源：

THIN SOLID FILMS | 1980年 / 66卷 / 02期

关键词：

D O I：

10.1016/0040-6090(80)90231-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：L15 / L18

页数：4

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