COMPARISON OF PUMPING SPEED MEASUREMENT METHODS

被引：6

作者：

DENISON, DR ^{[1
]}

MCKEE, ES ^{[1
]}

机构：

[1] PERKIN ELMER ULTEK INC,POB 10920,PALO ALTO,CA 94303

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期

关键词：

D O I：

10.1116/1.1318612

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：337 / 339

页数：3

共 14 条

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[3]

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[5] MEASURED SPEED ON AN IDEAL PUMP [J].

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VACUUM, 1965, 15 (02) :53-&

[6]

DEGRAS D, 1960, ADV VACUUM SCIENCE T

[7] CALIBRATION OF IONIZATION GAUGE FOR DIFFERENT GASES [J].

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YOUNG, AH .

PHYSICAL REVIEW, 1945, 68 (11-1) :278-278

[8] MONTE CARLO COMPUTATIONS ON MOLECULAR FLOW IN PUMPING SPEED TEST DOMES [J].

FISCHER, E ;

MOMMSEN, H .

VACUUM, 1967, 17 (06) :309-&

[9]

NOLLER HG, 1963, VACUUM, V13, P539

[10] AN ABSOLUTE HIGH RESOLUTION CALIBRATOR FOR VACUUM GAUGES [J].

SMETANA, FO ;

CARLEY, CT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1966, 3 (02) :49-&

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