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ORIENTED HYDROCARBONS TRANSFERRED FROM A HIGH-PERFORMANCE LUBRICATIVE AMORPHOUS C-H-SI FILM DURING SLIDING IN A VACUUM

被引：68
作者：
SUGIMOTO, I
MIYAKE, S
机构：
[1] NTT Applied Electronics Laboratories, Musashino-shi, Tokyo 180, Midori-cho
来源：
APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 19期
关键词：
D O I：
10.1063/1.103072
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Amorphous C:H containing silicon film shows an extremely low friction coefficient of 0.007 when the film is rubbed with a steel ball in a vacuum. This film is deposited on steel with an electron cyclotron resonance plasma of ethylene and silane. Polarized microinfrared spectroscopy reveals that high lubrication performance is attributed to hydrocarbons transferred from the rubbed film to the ball surface and oriented along the sliding direction.
引用
收藏
页码：1868 / 1870
页数：3
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