THERMODYNAMIC APPROACH OF CHEMICAL DEPOSITION CONDITIONS OF BORON ON METAL-SUBSTRATE

被引：14

作者：

THEBAULT, J ^{[1
]}

NASLAIN, R ^{[1
]}

BERNARD, C ^{[1
]}

机构：

[1] ECOLE NATL SUPER ELECTROCHIM & ELECTROMET GRENOBLE,CTR INFORMAT THERMODYNAM CHIM MINERAL,CNRS,F-38401 ST MARTIN HERES,FRANCE

来源：

JOURNAL OF THE LESS-COMMON METALS | 1978年 / 57卷 / 01期

关键词：

D O I：

10.1016/0022-5088(78)90158-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：1 / 20

页数：20

共 28 条

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BERNARD, C ;

DENIEL, Y ;

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VAY, P ;

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JOURNAL OF THE LESS-COMMON METALS, 1975, 40 (02) :165-171

[3]

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[4]

BONETTI R, 1975, 5TH P INT C CHEM VAP, P495

[5]

CAMERON DJ, 1965, AWINEMR92AEEWR424 CO

[6]

CARLTON HE, 1970, 2ND P INT C CHEM VAP, P209

[7] THERMODYNAMIC EVALUATION BY AUTOMATIC CALCULATION OF MONOPHASIC OR BIPHASIC DEPOSIT DOMAINS IN SYSTEM TI-C-H-CL [J].

DUCARROIR, M ;

JAYMES, M ;

BERNARD, C ;

DENIEL, Y ;

JACQUOT, A .

JOURNAL OF CRYSTAL GROWTH, 1974, 23 (04) :299-303

[8] DETERMINATION OF COMPLEX CHEMICAL-EQUILIBRIA IN POLYPHASE SYSTEMS .2. APPLICATION TO CALCULATION OF DOMAINS OF DEPOSITION STARTING WITH VAPOR-PHASE OF SYSTEM TI-C-H-CL [J].

DUCARROIR, M ;

JAYMES, M ;

BERNARD, C ;

DENIEL, Y .

JOURNAL OF THE LESS-COMMON METALS, 1975, 40 (02) :173-183

[9]

DUCARROIR M, 1975, 5TH P INT C CHEM VAP, P72

[10]

GERASSINOV YI, 1972, TANTALUM ENERGY REV, V3

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