INFLUENCE OF OXYGEN ON THE UNIFORMITY OF RF-SPUTTERED AMORPHOUS GDCO FILMS

被引:9
作者
KOBAYASHI, K
TOGAMI, Y
TERANISHI, T
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D O I
10.1143/JJAP.19.L581
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O59 [应用物理学];
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页码:L581 / L584
页数:4
相关论文
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[3]   SHORT-RANGE ORDER IN ANNEALED GD-CO FILMS WITH PERPENDICULAR ANISOTROPY [J].
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[4]  
KOBLISKA RJ, 1974, AIP C P, V24, P570
[5]   INFLUENCE OF OXYGEN AND DEPOSITION CONDITIONS ON RF-SPUTTERED AMORPHOUS SI FILMS [J].
SHIMIZU, T ;
KUMEDA, M ;
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KAMONO, K .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (10) :1923-1929