WIDE-RANGE SCANNING AND LENS CORRECTION OF AN ION MICROPROBE

被引：4

作者：

MEIJER, J ^{[1
]}

STEPHAN, A ^{[1
]}

BUKOW, HH ^{[1
]}

ROLFS, C ^{[1
]}

BRUHN, F ^{[1
]}

机构：

[1] RUHR UNIV BOCHUM,INST GEOL,D-44780 BOCHUM,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1995年 / 104卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)00412-2

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The expected performance of a wide range scanning unit designed for an ion microprobe using a superconducting solenoid lens is investigated. Since the resulting spot size is mainly limited by chromatic aberration, the scanning unit should be installed close to the center of the solenoid lens to achieve optimal ion optical properties. Furthermore, the deflection system should consist of two independent controllable multipole units that correct an axial astigmatism introduced by a residual asymmetry of the solenoid lens.

引用

页码：77 / 80

页数：4

共 16 条

[1] ADJUSTABLE MULTIPOLE ELEMENTS [J].