ELECTROSTATIC ION OPTICS AND BEAM TRANSPORT FOR ION-IMPLANTATION

被引：7

作者：

LARSON, JD

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1981年 / 189卷 / 01期

关键词：

D O I：

10.1016/0029-554X(81)90127-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：71 / 91

页数：21

共 45 条

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