PHASE-CONTROL OF BI-SR-CA-CU-O THIN-FILMS PREPARED BY COEVAPORATION WITH RF OXYGEN PLASMA

被引：13

作者：

ISHIZUKA, Y

TERASHIMA, Y

MIURA, T

机构：

[1] Toshiba Research and Development Center, Saiwai-ku

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 11期

关键词：

Bi-Sr-Ca-Cu-O; Coevaporation; Phase control; Rf oxygen plasma;

D O I：

10.1143/JJAP.29.L2045

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin films of Bi-Sr-Ca-Cu-O were prepared on (100)SrTi03 substrates by coevaporation with rf oxygen plasma. It has been confirmed that the structural phases of films can be controlled mainly by the flux density of activated oxygen and the substrate temperature, and not by the chemical compositions of the films. Thin films in the Bi2(Sr, Ca)3Cu2Ov phase and the Bi2(Sr, Ca)2CuO>, phase were prepared by changing the flux density of activated oxygen and the substrate temperature. The films in the Bi2(Sr, Ca)3Cu2Oy phase showed superconducting transitions at 35 K. © 1990 IOP Publishing Ltd.

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收藏

页码：L2045 / L2048

页数：4

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