MICROMACHINED OPTICAL PLANES AND REFLECTORS IN SILICON

被引：19

作者：

ROSENGREN, L

SMITH, L

BACKLUND, Y

机构：

[1] Electronics Department, University of Uppsala, S-751 21 Uppsala

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 41卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(94)80132-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Anisotropic wet etching of silicon in KOH has been used to form microstructures for optical applications. Two optical beam splitters are presented which both make use of the well-defined 45-degrees angle between the [100] and [110] directions. In the [100] direction, vertical walls and comers are used as optical mirrors, and in the [110] direction, V-grooves bounded by {111} planes are used for optical fiber alignment.

引用

页码：330 / 333

页数：4

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