SCANNING MICRODEFORMATION MICROSCOPY

被引：76

作者：

CRETIN, B

STHAL, F

机构：

[1] Laboratoire de Physique et Métrologie des Oscillateurs, Associé À l'Université de Franche-Comté- Besaņon, 25000 Besaņon

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 08期

关键词：

D O I：

10.1063/1.108592

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have developed a new scanning microscope based on a vibrating contact tip and piezoelectric detection. Scanning the sample reveals surface topography and mainly, subsurface elastic properties. The preliminary images presented show surface and subsurface inhomogeneities in metallic samples. Lateral resolution is essentially related to the tip diameter as in near-field microscopes.

引用

页码：829 / 831

页数：3

共 13 条

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