ELECTRON-IMPACT IONIZATION CROSS-SECTIONS OF SIF2

被引：52

作者：

SHUL, RJ

HAYES, TR

WETZEL, RC

BAIOCCHI, FA

FREUND, RS

机构：

来源：

JOURNAL OF CHEMICAL PHYSICS | 1988年 / 89卷 / 07期

关键词：

D O I：

10.1063/1.454837

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：4042 / 4047

页数：6

共 19 条

[1] X1A1,A3B1, AND A1B1 ELECTRONIC STATES OF SILYLENES - STRUCTURES AND VIBRATIONAL FREQUENCIES OF SIH2, SIHF, AND SIF2 [J].

COLVIN, ME ;

GREV, RS ;

SCHAEFER, HF ;

BICERANO, J .

CHEMICAL PHYSICS LETTERS, 1983, 99 (5-6) :399-405

[2] CHEMICAL PROCESSES INVOLVED IN THE ETCHING OF SILICON BY XENON DIFLUORIDE [J].

DAGATA, JA ;

SQUIRE, DW ;

DULCEY, CS ;

HSU, DSY ;

LIN, MC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (05) :1495-1500

[3] PHOTOELECTRON-SPECTRUM OF SIF2 [J].

FEHLNER, TP ;

TURNER, DW .

INORGANIC CHEMISTRY, 1974, 13 (03) :754-755

[4]

FLAMM DL, 1984, VLSI ELECTRONICS MIC, pCH8

[5]

Freund R.S., 1987, SWARM STUDIES INELAS

[6] ABSOLUTE CROSS-SECTIONS FOR ELECTRON-IMPACT IONIZATION AND DISSOCIATIVE IONIZATION OF THE SIF FREE-RADICAL [J].

HAYES, TR ;

WETZEL, RC ;

BAIOCCHI, FA ;

FREUND, RS .

JOURNAL OF CHEMICAL PHYSICS, 1988, 88 (02) :823-829

[7]

HAYES TR, 1988, J CHEM PHYS, V89, pR40

[8]

HOULE F, COMMUNICATION

[9]

Huber K P., 1979, MOL SPECTRA MOL STRU

[10] STRUCTURAL AND ENERGETIC FEATURES OF FULLY SUBSTITUTED SILYLENES, DISILENES, AND SILYLSILYLENES (SILI2,LISISILI2, AND LISISI LI3), (SICH3,CH32SISICH32, AND CH3SISICH33), (SIF2,F2SISIF2, AND F2SISIF3) [J].

KROGHJESPERSEN, K .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1985, 107 (03) :537-543

← 1 2 →