HUMIDITY SENSOR USING SOL-GEL-DERIVED SILICA COATING ON QUARTZ-CRYSTAL

被引：29

作者：

SUN, HT ^{[1
]}

CHENG, ZT ^{[1
]}

YAO, X ^{[1
]}

WLODARSKI, W ^{[1
]}

机构：

[1] ROYAL MELBOURNE INST TECHNOL,DEPT COMMUN & ELECT ENGN,MELBOURNE,VIC 3001,AUSTRALIA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1993年 / 13卷 / 1-3期

关键词：

D O I：

10.1016/0925-4005(93)85336-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Porous silica coatings on AT-cut quartz crystals are derived from the sol-gel process. Hydrochloric acid catalyst is used to accelerate hydrolysis and polymerization of a silica solution. Experimental results show that the non-crystalline silica material has a lot of nanometer pores. The resonant frequency of the coated quartz resonantors decreases with increasing relative humidity. The maximum frequency shift of 3.72 kHz due to humidity is achieved. The response and long-term stability of the humidity sensor are investigated.

引用

页码：107 / 110

页数：4

共 4 条

[1]

CHU PY, 1988, ADV CERAM MATER, V3, P249

[2]

HAUPTMANN P, 1991, SENSOR ACTUAT A-PHYS, V25, P371

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MALLA, PB ;

KOMARNENI, S ;

TAGUCHI, H ;

KIDO, H .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (12) :2988-2995

[4] RELATIVE-HUMIDITY MEASUREMENTS USING A COATED PIEZOELECTRIC QUARTZ CRYSTAL SENSOR [J].

RANDIN, JP ;

ZULLIG, F .

SENSORS AND ACTUATORS, 1987, 11 (04) :319-328

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