CRYSTAL GROWTH AND ORIENTATION IN VACUUM-CONDENSED METAL DEPOSITS - A SYSTEMATIC CORRELATION WITH RESIDUAL PRESSURE, RATE OF DEPOSITION AND THICKNESS

被引:20
作者
PREECE, JB
WILMAN, H
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D O I
10.1088/0022-3727/2/7/303
中图分类号
O59 [应用物理学];
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摘要
Extensive electron diffraction studies have been made of the surface structure of tin films condensed in vacuum on to glass substrates initially at room temperature. Rates of deposition were 0-150 Å s-1, film thicknesses up to 5000 Å and residual air pressures 10-8- 10-3 torr. The preferred orientation of the tin crystals depends systematically on the air pressure, as well as on the film thickness and rate of deposition. At 10-7 torr or less, at up to 70 Å s -1, the tin was very strongly oriented with {100} planes parallel to the substrate, but at 10-6-10-5 torr this was mixed with a less strong {001} orientation, and at higher pressures {001}, {301} or {110} orientation occurred in particular regions of the variables. These orientations other than {100} evidently arose because the corresponding plane faces were developed on the growing crystals, depending on the amount of adsorption of the residual gas on the crystal surface.
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页码:967 / &
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