PREPARATION AND FERROELECTRIC PROPERTIES OF PBZR0.53TI0.47O3 THIN-FILMS BY SPIN COATING AND METALORGANIC DECOMPOSITION

Films with a composition PbZr0.53Ti0.47O3 were prepared on different platinum bottom electrodes using a spin-coating process followed by metalorganic decomposition. The film morphology and structure were characterized by scanning electron microscopy and x-ray diffraction analysis. The morphology was strongly influenced by the heat cycle used to form the PbZr0.53Ti0.47O3 layer. Fast heating and high-fire temperatures produced smooth films, while slow heating and low-fire temperatures gave films having a rosette perovskite phase and an inter-rosette second phase. The films were characterized electrically by measuring hysteresis loops and capacitance and conductance versus bias voltage and by pulse-switching measurements. The dependence of the switched and nonswitched polarization on the number of switching cycles (i.e., the fatigue behavior) is found to be much better for fast-heated than for slowly heated films. Switching lifetimes exceeding 10(11) cycles were measured. The type of platinum bottom electrode used was found to have a large influence on the ferroelectric properties of the lead zirconate titanate films.