2-DIMENSIONAL ATOMIC FORCE MICROPROBE TRENCH METROLOGY SYSTEM

被引:31
作者
NYYSSONEN, D
LANDSTEIN, L
COOMBS, E
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 06期
关键词
D O I
10.1116/1.585855
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This article describes the extension of atomic force microprobe (AFM) technology to two dimensions (2D) for accurate measurement of submicron critical dimensions (CDs). The system utilizes a vibrating tip with heterodyne-interferometer sensor similar to that introduced by Martin, Williams, and Wickramasinghe. [Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 61, 4723 (1987)]. However, the tip vibrates in 2D with dual heterodyne detection. The sample is moved relative to the tip by means of coarse-and fine-motion stages whose position is monitored with 3D interferometry. The system does not scan the sample, but operates like a nanorobot sensing the approach of the tip to the surface by means of the vibration damping. A special three-point tip has been fabricated by Lee [K. L. Lee, D. W. Abraham, F. Serord, and L. Landstein, Proceedings of the 35th ISEIPB Conference, Seattle, WA, May 28-31, 1991 (unpublished), paper K1] with 0.1-mu-m shank diameter which allows measurement of submicrometer trench widths up to 2-mu-m in depth with accuracy and repeatability at the nanometer level. Measurements are made under computer control. The system design and operating characteristics are discussed.
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页码:3612 / 3616
页数:5
相关论文
共 3 条
[1]  
LEE KL, 1991, UNPUB 35TH P ISEIPB
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