CVD PROCESSING

被引：23

作者：

HIRAI, T

机构：

来源：

关键词：

D O I：

10.1557/S0883769400048946

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：45 / 47

页数：3

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KOWBEL W, 1993, CERAM T, V34, P237

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SASAKI M, 1991, NIPPON SERAM KYO GAK, V99, P1002, DOI 10.2109/jcersj.99.1002